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WebA cluster tool designed for the deposition of thin films using magnetron sputtering on 200mm SEMI standard silicon substrates. The system features two wafer cassette load … WebFind GaSonics, March Instruments, TePla, Plasma-Therm, Yield Engineering, Lam Research, and BT for sale on Machinio. USD ($) USD - United States Dollar (US$) EUR - Euro (€) GBP … WebA cluster tool designed for the deposition of thin films using magnetron sputtering on 200mm SEMI standard silicon substrates. The system features two wafer cassette load-locks (25 + 25 wafers), a central distribution chamber, with substrate aligner, buffer and cooling stations and four process chambers. A first process chamber is dedicate to ... greenkey 30cm rolling lawn aerator